JPH05828Y2 - - Google Patents

Info

Publication number
JPH05828Y2
JPH05828Y2 JP5595888U JP5595888U JPH05828Y2 JP H05828 Y2 JPH05828 Y2 JP H05828Y2 JP 5595888 U JP5595888 U JP 5595888U JP 5595888 U JP5595888 U JP 5595888U JP H05828 Y2 JPH05828 Y2 JP H05828Y2
Authority
JP
Japan
Prior art keywords
elastic plate
vibration
vibration sensor
natural frequency
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5595888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01160337U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5595888U priority Critical patent/JPH05828Y2/ja
Publication of JPH01160337U publication Critical patent/JPH01160337U/ja
Application granted granted Critical
Publication of JPH05828Y2 publication Critical patent/JPH05828Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP5595888U 1988-04-27 1988-04-27 Expired - Lifetime JPH05828Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5595888U JPH05828Y2 (en]) 1988-04-27 1988-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5595888U JPH05828Y2 (en]) 1988-04-27 1988-04-27

Publications (2)

Publication Number Publication Date
JPH01160337U JPH01160337U (en]) 1989-11-07
JPH05828Y2 true JPH05828Y2 (en]) 1993-01-11

Family

ID=31281843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5595888U Expired - Lifetime JPH05828Y2 (en]) 1988-04-27 1988-04-27

Country Status (1)

Country Link
JP (1) JPH05828Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3460771B2 (ja) * 1996-05-15 2003-10-27 株式会社タツノ・メカトロニクス 感震機能付き給油装置

Also Published As

Publication number Publication date
JPH01160337U (en]) 1989-11-07

Similar Documents

Publication Publication Date Title
US4479385A (en) Double resonator cantilever accelerometer
EP0900385B1 (en) Electrostatic drive for accelerometer
CN110412362A (zh) 压电驱动互屏蔽电极微型电场传感器
EP3598146B1 (en) Microelectromechanical device for out-of-plane motion detection
CN1318821C (zh) 使用调谐加速计的微机械硅陀螺仪
CN101515026A (zh) 谐振式微机电系统磁场传感器及测量方法
JP2000206141A (ja) 運動量センサ
CN101358992A (zh) 正交环型压电加速度计
JP4719751B2 (ja) 角速度のための振動マイクロ−メカニカルセンサー
JP2000512019A (ja) 小型ボックス型振動ジャイロスコープ
JPH05828Y2 (en])
KR100934217B1 (ko) 진동 측정을 위한 미소센서
RU2222780C1 (ru) Чувствительный элемент микромеханического гироскопа
RU2217767C1 (ru) Датчик резонаторный
US6895819B1 (en) Acceleration sensor
US4653325A (en) Gyro apparatus
CN108955985B (zh) 一种可以测试多轴向力学物理量的传感器结构
EP1166129B1 (en) Vibrating beam force sensor
CN2397473Y (zh) 栅型结构电容式微机械谐振陀螺
RU2281515C1 (ru) Датчик резонаторный
JPH0626852Y2 (ja) 加速度センサー
EP2201387B1 (en) Flexural pivot for micro-sensors
RU18768U1 (ru) Микромеханический вибрационный гироскоп
JPH03108628A (ja) 振動梁型圧力センサ
RU2234679C2 (ru) Микромеханический датчик угловой скорости